CMEMS® Oscillator ICs

Silicon Labs’ Si501/2/3/4 CMEMS® general-purpose oscillators are a perfect fit for low cost, high shock applications. Their single-chip construction provides lower cost, greater reliability, and better aging than traditional crystal oscillators of the same class. They are highly robust against shock and vibration, offer ±20 ppm frequency stability guaranteed for 10 years, and are drop-in compatible to traditional XOs in the same class.
Browse standard configurations for the most popular CMEMS devices. If your device preference is not there, use the on-line configurator to get custom samples in less than 2 weeks. Or buy a Field Programming Kit to get samples any time you need them, right in your development lab.
Part NumberDescriptionFrequency RangeStability (+/- ppm)Temperature RangePackage SizePeriod Jitter (RMS)
Si501Single Frequency (OE)0.032 - 100 MHz20; 30; 50-40 to 85 °C; -20 to 70 °C2x2.5 mm; 2.5x3.2 mm; 3.2x5 mm1.1 ps
Si502Dual Frequency (OE/FS)0.032 - 100 MHz20; 30; 50-40 to 85 °C; -20 to 70 °C2x2.5 mm; 2.5x3.2 mm; 3.2x5 mm1.1 ps
Si503Quad Frequency (FS Only)0.032 - 100 MHz20; 30; 50-40 to 85 °C; -20 to 70 °C2x2.5 mm; 2.5x3.2 mm; 3.2x5 mm1.1 ps
Si504In-circuit, 1 wire Programmable for Any Frequency/Feature0.032 - 100 MHz20; 30; 50-40 to 85 °C; -20 to 70 °C2x2.5 mm; 2.5x3.2 mm; 3.2x5 mm1.1 ps
 
 
 

CMEMS Technology — Better by Design

MEMS Oscillator ResonatorSilicon Labs’ CMEMS oscillators are built using a revolutionary technology. The single-chip design offers outstanding device reliability and guarantees ±20 ppm frequency stability for 10 years of operating life. It layers fine-line MEMS construction directly on top of standard CMOS processing, leveraging the sophistication, low cost and enormous scale of the most common foundry materials in the world.
 
 
 
 

Learn More

  • CMEMS Oscillator Architecture

    Download this white paper to learn about CMEMS process technology, existing hybrid oscillator architectures and the CMEMS oscillator architecture
  • Leveraging CMEMS Technology

    Download this white paper to learn about leveraging high-volume CMOS manufacturing for MEMS-based frequency control
 
 

Design Resources

  • Short Lead Times

    To help you get to market faster, Silicon Labs offers custom, factory-programmable clocks and oscillators. Once ordered, samples generally ship within 2 weeks.